On-Chip micro-supercapacitors

Monolithic CDC films can be fabricated by extraction of metal from thin carbide films and have a great potential for fabrication of on-chip micro-supercapacitors. The fabrication process of CDC films starts with magnetron sputtering of carbide films (Prof. J. Hettinger, Rowan University) followed by chlorination to form a porous carbon film. The CDC films showed an outstanding performance as supercapacitor electrodes when tested in an organic electrolyte. Moreover, micro-supercapacitors with interdigitated electrodes were fabricated by pattering of the CDC films through standard microfabrication methods in France (in collaboration with Prof. P. Simon) and showed a great potential for integrated electronics.